366: Chapter 366 Quadruple Exposure! This Doesn't Conform to Physics

After watching for a while, Wang Jianping stood up, entranced. He asked the staff member wearing the National Fund badge, his mood somewhat agitated.

"How many times was the multi-patterning performed on this equipment?"

The person glanced at him and then laughed: "Mr. Wang, you can tell at a glance. Quadruple!"

Quadruple Patterning is an extremely limit-pushing process for a dry 193nm Lithography Machine; it is already the limit for mass production...

As for the six-fold patterning in the laboratory, it has no meaning; the yield rate would be so low that it would not be viable for production.

That is purely progress for the sake of progress!

Wang Jianping stood there in shock. As a professional, he was well aware of what that answer represented.

Although Quadruple Patterning is not as extreme as six-fold, it is still a low-yield process under extreme production conditions; even if the process is perfected, the maximum yield is only around 70%.

"Quadruple? 193nm, Quadruple Patterning for 14nm—what is the overlay accuracy? You people are crazy."

"The overlay error is controlled within 2nm!"

Wang Jianping widened his eyes again, then knitted his brows tightly.

"2nm? With a 193nm wavelength, Quadruple Patterning can achieve 2nm? Did you dig up Newton himself?"

After all, based on his professional knowledge, this simply defied the laws of physics.

Soon, another thought occurred to him, and he grabbed the staff member tightly: "What alignment scheme are you using?"

The person did not answer, but instead pulled a technical manual from the folder nearby, flipped to a certain page, and handed it to Wang Jianping.

After taking it, Wang Jianping's gaze swept across the technical parameters on that page, then stopped. His hand trembled slightly.

"This... this is..."

"Standard factory-shipped Lithography Machines do not include this algorithm; this is a custom version developed by Transsion Technology themselves... However, if you want to understand the specific algorithmic details, you need to sign a 'Non-Disclosure Agreement' to view them."

The person gently interrupted him.

"But I can tell you one piece of public data: this machine has been running on Transsion's production line for over 60 days. The total wafer output exceeded 15,000 units, though the process was controlled at 22nm with a yield rate of 85%. The head of the acceptance team was Professor Wang Zhihua, your mentor at Peking University. You can review the report he signed at any time."

Wang Jianguo's lips moved. Given the current relationship between Huaxin International and Transsion Technology, that Non-Disclosure Agreement was, without a doubt, a job-hopping agreement...

Finally, he turned around and glanced at the Lithography Machine once more. The machine's exterior was white, imprinted with "China Semiconductor National Fund," along with a striking serial number, NSE-CX14C [National Semiconductor Equipment Series, Morning Star 14C].

He reached out and gently touched the serial number, as if touching the forehead of a newborn. For China, was this Lithography Machine not a newborn as well? It was just that this newborn from China Star was growing a bit too fast.

"We have waited 20 years for this machine."

His voice was very low, as if he were talking to himself, but his mood... was incredibly agitated.

He slowly withdrew his hand from the machine's body, the agitation in his eyes not yet fully calmed, and he could be described as looking back with every step he took...

Suddenly, he stumbled, but his breathing steadied first. He turned to look at the staff member nearby. Just a moment ago, he had been unable to believe the result, but now it had transformed into countless expectations and pleas; yet, the urgency deep in his bones could not be hidden.

"I want to ask one more honest question: when will this Morning Star 14A start mass production and supply? What is the price? Can our Huaxin International sign an intent order and get into the supply queue?"

As for why Wang Jianguo's question was so blunt and so humble? This was because Huaxin International had previously leaked rumors from the outside claiming that the domestically produced Lithography Machine had achieved a breakthrough, attempting to attract traffic for themselves... As it turned out, the first Lithography Machine had nothing to do with them, and they hadn't even received any response when inquiring about orders. Therefore, in front of them, he was not the powerful President Wang of Huaxin International, but merely a 'Little Wang' paying for his own mistakes.

The staff member looked at him in this state, and there was a hint of a sigh in his eyes—if only they had known, why act that way in the beginning? However, Transsion did not hold that much animosity toward Huaxin International; giving them a lesson was enough...

"Mr. Wang, this Morning Star 14 series Lithography Machine is a mass-production piece of equipment led by the National Semiconductor Big Fund and developed under the leadership of Transsion Technology. The supply list was originally intended for all compliant wafer foundry enterprises. Once the technology matures in the future, it will also be open to global partners. However, the first batch is still aimed at the domestic market, and Huaxin International, as a leading domestic enterprise, is naturally on the priority supply list."

Before the staff member's words had even finished, just as Wang Jianping was about to heave a sigh of relief, the other party suddenly changed the subject, stating the most difficult problem at the moment.

"There is just one problem right now: the production capacity of the first mass-production line has already been completely locked in. The projected annual output for this Lithography Machine is eight units, all of which have currently been allocated to the wafer foundry under Transsion for the mass production of the 22nm mature process and further ramp-up verification of the 14nm process. For subsequent batches, capacity will need some adjustment, which will take about 18 months. Following standard procedures, your company will need to queue for the goods; it will take at least a year and a half to receive the first domestic piece of equipment."

"18 months..." Wang Jianping's brows furrowed again. He was painfully aware of what 18 months meant. Moreover, this was only if everything went smoothly; if there were any slight issues, they wouldn't be able to get it until at least the end of 2014 or mid-2015. By then, the global semiconductor industry would have fully entered the 14nm era... while they would still be lagging behind. At that time, they would still only be able to provide foundry services for mature processes, and they would be unable to use domestic equipment to move into the high-end market.

He stepped forward half a step, his tone becoming even more complicated: "Comrade!" He uttered these two words, and the staff member's heart twitched slightly.

"I know that capacity is tight, and I know that this equipment cannot do without Transsion's assistance, and prioritizing them to improve semiconductors is important. But Huaxin International also really needs this equipment; we also need to verify some advanced technologies... For the breakthrough of the 28nm process, we have also laid the groundwork for a long time, but we are still stuck at the Lithography Machine stage."

The staff member's heart twitched again at this. 28nm—Huaxin International did indeed have plans in this regard, but as for having laid the groundwork for a long time, he really hadn't heard of it...

Seeing the other party's emotions change, Wang Jianping immediately pressed his advantage.

"We are willing to pay the full price of the equipment in advance, unconditionally sign the strictest Non-Disclosure Agreement, and share all subsequent process debugging data with Transsion Technology and the National Big Fund. We will fully cooperate with the requirements of the leading group regarding production line layout and personnel adjustments!"

After all, paying in full was not something he hadn't done before; it was just that previously, even with full payment, there was no guarantee of getting the goods. But for this, as long as he paid in full, there would definitely be no problem... Wang Jianping could make the decision on this little matter!